about LTO recipes

Robin King robinhmb at yahoo.com
Tue Oct 20 01:32:25 PDT 2009


PC = Pressure Controlled.  
It servos the pressure to a specific value rather than letting the pressure float, or vary, with the speed of the pump. 
 
This should make the results more repeatable. 


Robin King
IBM Almaden research center



--- On Tue, 10/20/09, fanpy839 <fanpy839 at stanford.edu> wrote:

> From: fanpy839 <fanpy839 at stanford.edu>
> Subject: about LTO recipes
> To: "tylanbpsg" <tylanbpsg at snf.stanford.edu>
> Date: Tuesday, October 20, 2009, 12:37 AM
> 
> 
>  
> 
>  
>  
> Hi All,
>  
> Can anyone tell me what do the recipes that end
> with "PC" differ from 
> those without "PC"? Do they give better
> deposition quality or something?
>  
> Thank you so much!
>  
> Best,
> Pengyu
>  
> 2009-10-19 
> 
> 
> 
> fanpy839 
>  
> 



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