max oxide thickness?

Chris McGuinness cmcg at stanford.edu
Thu Oct 29 16:25:35 PDT 2009


Hi all,
What is the maximum oxide thickness that can be deposited using LTO400 or LTO300?  Does the film begin to crack under stress from the oxide at this point?  Has anyone tried to increase this maximum film thickness by annealing or doing other tricks?
Thanks,
Chris McGuinness



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