From maurice at stanford.edu  Tue Apr 20 08:29:08 2010
From: maurice at stanford.edu (maurice stevens)
Date: Tue, 20 Apr 2010 08:29:08 -0700
Subject: LTO400PC dep rate a little high
Message-ID: <4BCDC844.9080909@stanford.edu>

Robin reported on Coral last night that the dep rate is higher after the 
sheath was replaced. 

Check the logbook for the most recent deposition rate.  If your work is 
critical, you may want to run a test run first.

-m

-------- Original Message --------
Subject: 	Comment tylanbpsg SNF 2010-04-20 01:25:27: LTO400PC dep rate a 
little high
Date: 	Tue, 20 Apr 2010 01:25:27 -0700
From: 	king at snf.stanford.edu
To: 	tylanbpsg-pcs at snf.stanford.edu



LTO400PC gave 191.5 A/min and 191.6 A/min in two runs:  1312A in 6 min 50 sec and 1053.6A in 5.5 min.   It's usually around 160A/min or so. 



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From robinhmb at yahoo.com  Tue Apr 20 13:45:15 2010
From: robinhmb at yahoo.com (Robin King)
Date: Tue, 20 Apr 2010 13:45:15 -0700 (PDT)
Subject: LTO400PC dep rate a little high
In-Reply-To: <4BCDC844.9080909@stanford.edu>
Message-ID: <843387.31599.qm@web111502.mail.gq1.yahoo.com>

Thanks for sending this Maurice.  Everything looked normal for flows and pressure and the refractive index was about 1.464 average per Rudolf ellipsometer. 

I'll guess the dep rate will fall once it's coated up more but it was unusually high even for just being cleaned. 

--- On Tue, 4/20/10, maurice stevens <maurice at stanford.edu> wrote:

> From: maurice stevens <maurice at stanford.edu>
> Subject: LTO400PC dep rate a little high
> To: tylanbpsg at snf.stanford.edu
> Date: Tuesday, April 20, 2010, 8:29 AM
> Robin reported on Coral last night
> that the dep rate is higher after the sheath was replaced. 
> Check the logbook for the most recent deposition
> rate.? If your work is critical, you may want to run a
> test run first.
> 
> -m
> 
> -------- Original Message --------
> Subject: ??? Comment tylanbpsg SNF
> 2010-04-20 01:25:27: LTO400PC dep rate a little high
> Date: ??? Tue, 20 Apr 2010 01:25:27 -0700
> From: ??? king at snf.stanford.edu
> To: ??? tylanbpsg-pcs at snf.stanford.edu
> 
> 
> 
> LTO400PC gave 191.5 A/min and 191.6 A/min in two
> runs:? 1312A in 6 min 50 sec and 1053.6A in 5.5
> min.???It's usually around 160A/min or so. 
> 
> 
> -- maurice at stanford.edu
> 
> Maurice Stevens
> Stanford Nanofabrication Facility
> CIS Room 142, Mail Code 4070
> Stanford, CA? 94305
> P. (650)725-3660
> F. (650)725.6278
> 
> 


From cmcg at stanford.edu  Tue Apr 20 21:00:28 2010
From: cmcg at stanford.edu (Chris McGuinness)
Date: Tue, 20 Apr 2010 21:00:28 -0700 (PDT)
Subject: beware, large wafer-wafer fluctuations in tylanbpsg
Message-ID: <1615169967.681441271822428948.JavaMail.root@zm02.stanford.edu>

Copied note from coral (running LTO400PC):
Dep rate:
160A/min (nominal)
185A/min (today)
Std across wafer (measuring ~1" in from edge of wafer for ~.5um dep):
1% (nominal)
3% (today)
Std between wafers (std(avg)):
1-2% (nominal)
6.5% (today)


From gthareja at stanford.edu  Sun Apr 25 03:38:51 2010
From: gthareja at stanford.edu (Gaurav Thareja)
Date: Sun, 25 Apr 2010 03:38:51 -0700 (PDT)
Subject: LTO free Sunday morning.
Message-ID: <286574648.1606881272191931162.JavaMail.root@zm06.stanford.edu>