LTO400PC dep rate a little high

maurice stevens maurice at stanford.edu
Tue Apr 20 08:29:08 PDT 2010


Robin reported on Coral last night that the dep rate is higher after the 
sheath was replaced. 

Check the logbook for the most recent deposition rate.  If your work is 
critical, you may want to run a test run first.

-m

-------- Original Message --------
Subject: 	Comment tylanbpsg SNF 2010-04-20 01:25:27: LTO400PC dep rate a 
little high
Date: 	Tue, 20 Apr 2010 01:25:27 -0700
From: 	king at snf.stanford.edu
To: 	tylanbpsg-pcs at snf.stanford.edu



LTO400PC gave 191.5 A/min and 191.6 A/min in two runs:  1312A in 6 min 50 sec and 1053.6A in 5.5 min.   It's usually around 160A/min or so. 



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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