LTO400PC dep rate a little high

Robin King robinhmb at yahoo.com
Tue Apr 20 13:45:15 PDT 2010


Thanks for sending this Maurice.  Everything looked normal for flows and pressure and the refractive index was about 1.464 average per Rudolf ellipsometer. 

I'll guess the dep rate will fall once it's coated up more but it was unusually high even for just being cleaned. 

--- On Tue, 4/20/10, maurice stevens <maurice at stanford.edu> wrote:

> From: maurice stevens <maurice at stanford.edu>
> Subject: LTO400PC dep rate a little high
> To: tylanbpsg at snf.stanford.edu
> Date: Tuesday, April 20, 2010, 8:29 AM
> Robin reported on Coral last night
> that the dep rate is higher after the sheath was replaced. 
> Check the logbook for the most recent deposition
> rate.  If your work is critical, you may want to run a
> test run first.
> 
> -m
> 
> -------- Original Message --------
> Subject:     Comment tylanbpsg SNF
> 2010-04-20 01:25:27: LTO400PC dep rate a little high
> Date:     Tue, 20 Apr 2010 01:25:27 -0700
> From:     king at snf.stanford.edu
> To:     tylanbpsg-pcs at snf.stanford.edu
> 
> 
> 
> LTO400PC gave 191.5 A/min and 191.6 A/min in two
> runs:  1312A in 6 min 50 sec and 1053.6A in 5.5
> min.   It's usually around 160A/min or so. 
> 
> 
> -- maurice at stanford.edu
> 
> Maurice Stevens
> Stanford Nanofabrication Facility
> CIS Room 142, Mail Code 4070
> Stanford, CA  94305
> P. (650)725-3660
> F. (650)725.6278
> 
> 



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