beware, large wafer-wafer fluctuations in tylanbpsg

Chris McGuinness cmcg at stanford.edu
Tue Apr 20 21:00:28 PDT 2010


Copied note from coral (running LTO400PC):
Dep rate:
160A/min (nominal)
185A/min (today)
Std across wafer (measuring ~1" in from edge of wafer for ~.5um dep):
1% (nominal)
3% (today)
Std between wafers (std(avg)):
1-2% (nominal)
6.5% (today)



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