From maurice at stanford.edu Thu Aug 12 14:35:56 2010 From: maurice at stanford.edu (maurice stevens) Date: Thu, 12 Aug 2010 14:35:56 -0700 Subject: Tylan BPSG up for undoped growth only Message-ID: <4C64693C.1080604@stanford.edu> ZZP is running LTO300PC as a test. -------- Original Message -------- Subject: Re: Shutdown tylanbpsg SNF 2010-08-05 07:26:39: Gas problems Date: Thu, 12 Aug 2010 08:54:28 -0700 From: seymour at snf.stanford.edu To: tylanbpsg-pcs at snf.stanford.edu pump changed, exhaust lines cleaned and new seals put in. Ran LTO400 30 mins,and monitored pump cabinet, gas cabinet, exhaust lines, and tube front loader area. No hydrides detected with the Eagle. removing shutdown to allow use for undoped LTO process. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From zzp at stanford.edu Sun Aug 15 15:38:37 2010 From: zzp at stanford.edu (Zhiping Zhang) Date: Sun, 15 Aug 2010 15:38:37 -0700 (PDT) Subject: reservation 4-6:30pm leased In-Reply-To: <28706_1281648955_4C64693B_28706_18_5_4C64693C.1080604@stanford.edu> Message-ID: <1170490368.19293.1281911917866.JavaMail.root@zm01.stanford.edu> sorry for the short notice, sample not ready From jcdoll at stanford.edu Tue Aug 24 13:44:09 2010 From: jcdoll at stanford.edu (Joey Doll) Date: Tue, 24 Aug 2010 13:44:09 -0700 Subject: Typical Roughness of LTO? Message-ID: Hi bpsg users - Has anyone measured the surface roughness of undoped LTO films deposited in tylanbpsg? I'd like to deposit a piezoelectric film on top of 100-200nm thick LTO and the smoother the starting surface the better. Data for any temperature/film thickness would be helpful. Thanks! Joey -------------- next part -------------- An HTML attachment was scrubbed... URL: From chienyuc at stanford.edu Tue Aug 31 14:45:00 2010 From: chienyuc at stanford.edu (Chien-Yu Chen) Date: Tue, 31 Aug 2010 14:45:00 -0700 (PDT) Subject: Reservation released today 1630-2100 Message-ID: <895761856.422695.1283291100106.JavaMail.root@zm03.stanford.edu> Wafers will not be ready before tube testing. From maurice at stanford.edu Tue Aug 31 16:58:17 2010 From: maurice at stanford.edu (maurice) Date: Tue, 31 Aug 2010 16:58:17 -0700 Subject: Problem tylanbpsg: Thin dep Message-ID: <4C7D9719.3090403@stanford.edu> TylanBPSG is yellow lighted. My test after the tube replacement was much thinner than expected. Cursive is running another test and will post his results on Coral. -------- Original Message -------- Subject: Problem tylanbpsg SNF 2010-08-31 16:53:39: Thin dep Date: Tue, 31 Aug 2010 16:53:39 -0700 From: maurice at snf.stanford.edu To: tylanbpsg-pcs at snf.stanford.edu Ran LTO400PC after tube pull. 00:20:00 expected 2600ang actual 1431 (index of refraction was normal...1.45) Cursive will run another test -------------- next part -------------- An HTML attachment was scrubbed... URL: