Tylan BPSG up for undoped growth only

maurice stevens maurice at stanford.edu
Thu Aug 12 14:35:56 PDT 2010


ZZP is running LTO300PC as a test.

-------- Original Message --------
Subject: 	Re: Shutdown tylanbpsg SNF 2010-08-05 07:26:39: Gas problems
Date: 	Thu, 12 Aug 2010 08:54:28 -0700
From: 	seymour at snf.stanford.edu
To: 	tylanbpsg-pcs at snf.stanford.edu



pump changed, exhaust lines cleaned and new seals put in. 
Ran LTO400 30 mins,and monitored pump cabinet, gas cabinet, exhaust lines, and tube front loader area. 
No hydrides detected with the Eagle.
removing shutdown to allow use for undoped LTO process.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




More information about the tylanbpsg mailing list