Typical Roughness of LTO?

Joey Doll jcdoll at stanford.edu
Tue Aug 24 13:44:09 PDT 2010


Hi bpsg users -
Has anyone measured the surface roughness of undoped LTO films deposited in
tylanbpsg? I'd like to deposit a piezoelectric film on top of 100-200nm
thick LTO and the smoother the starting surface the better. Data for any
temperature/film thickness would be helpful.

Thanks!
Joey
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