From gthareja at stanford.edu  Wed Jul  7 22:37:07 2010
From: gthareja at stanford.edu (Gaurav Thareja)
Date: Wed, 7 Jul 2010 22:37:07 -0700 (PDT)
Subject: LTO free 0a Thurs
Message-ID: <120917948.352314.1278567427209.JavaMail.root@zm06.stanford.edu>



-- 
Gaurav Thareja
Ph.D candidate, Nishi group
Electrical Engineering
Stanford University
420 Via Palou Mall, CISX 128
Stanford, CA 94305
Tel: 650-704-1029
Email: gthareja at stanford.edu



From maurice at stanford.edu  Fri Jul  9 12:00:59 2010
From: maurice at stanford.edu (maurice stevens)
Date: Fri, 09 Jul 2010 12:00:59 -0700
Subject: TylanBPSG has an intermittent issue with O2 flow 
Message-ID: <4C3771EB.6010001@stanford.edu>

The output connections have been checked and the MFC has been replaced. 
We are continuing to monitor this tube.

If you choose to use TylanBPSG before we have resolve this problem:

1.   We strongly recommend that you watch your run.
2.   Press "ALARM ACK" if the O2 alarm goes off (O2 should then return 
to the recipe set point).
3.   Make a comment on coral with the recipe name, step number, step time.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From robinhmb at yahoo.com  Fri Jul  9 14:48:05 2010
From: robinhmb at yahoo.com (Robin King)
Date: Fri, 9 Jul 2010 14:48:05 -0700 (PDT)
Subject: TylanBPSG has an intermittent issue with O2 flow
In-Reply-To: <4C3771EB.6010001@stanford.edu>
Message-ID: <181812.5881.qm@web111506.mail.gq1.yahoo.com>

Thanks Maurice.  Is anyone seeing Si particles in their films when this happens?



--- On Fri, 7/9/10, maurice stevens <maurice at stanford.edu> wrote:

> From: maurice stevens <maurice at stanford.edu>
> Subject: TylanBPSG has an intermittent issue with O2 flow
> To: tylanbpsg at snf.stanford.edu
> Date: Friday, July 9, 2010, 12:00 PM
> The output connections have been
> checked and the MFC has been replaced. We are continuing to
> monitor this tube.
> 
> If you choose to use TylanBPSG before we have resolve this
> problem:
> 
> 1.???We strongly recommend that you watch
> your run.
> 2.???Press "ALARM ACK" if the O2 alarm goes
> off (O2 should then return to the recipe set point).
> 3.???Make a comment on coral with the recipe
> name, step number, step time.
> 
> 
> 
> -- maurice at stanford.edu
> 
> Maurice Stevens
> Stanford Nanofabrication Facility
> CIS Room 142, Mail Code 4070
> Stanford, CA? 94305
> P. (650)725-3660
> F. (650)725.6278
> 
> 


From chienyuc at stanford.edu  Fri Jul 16 14:56:00 2010
From: chienyuc at stanford.edu (Chien-Yu Chen)
Date: Fri, 16 Jul 2010 14:56:00 -0700 (PDT)
Subject: Tylanbpsg reservation release 7-9pm today
Message-ID: <294952040.60348.1279317360732.JavaMail.root@zm03.stanford.edu>

Previous process will not be ready.


From gthareja at stanford.edu  Mon Jul 19 00:12:39 2010
From: gthareja at stanford.edu (Gaurav Thareja)
Date: Mon, 19 Jul 2010 00:12:39 -0700 (PDT)
Subject: LTO free 9a Mon
Message-ID: <176848078.82210.1279523559152.JavaMail.root@zm06.stanford.edu>



From chienyuc at stanford.edu  Fri Jul 23 17:29:39 2010
From: chienyuc at stanford.edu (Chien-Yu Chen)
Date: Fri, 23 Jul 2010 17:29:39 -0700 (PDT)
Subject: Reservation release Friday 1830-2100
Message-ID: <1022594835.200960.1279931379111.JavaMail.root@zm03.stanford.edu>

Wafers are not ready.


From maurice at stanford.edu  Mon Jul 26 16:48:28 2010
From: maurice at stanford.edu (maurice stevens)
Date: Mon, 26 Jul 2010 16:48:28 -0700
Subject: Finished training early_free til 6:30
Message-ID: <4C4E1ECC.7040709@stanford.edu>

have fun

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From chienyuc at stanford.edu  Mon Jul 26 17:34:40 2010
From: chienyuc at stanford.edu (Chien-Yu Chen)
Date: Mon, 26 Jul 2010 17:34:40 -0700 (PDT)
Subject: tylanbpsg reservation released today 1830-2100
Message-ID: <262607167.245506.1280190880228.JavaMail.root@zm03.stanford.edu>

Wafers will not be ready.