TylanBPSG has an intermittent issue with O2 flow

maurice stevens maurice at stanford.edu
Fri Jul 9 12:00:59 PDT 2010


The output connections have been checked and the MFC has been replaced. 
We are continuing to monitor this tube.

If you choose to use TylanBPSG before we have resolve this problem:

1.   We strongly recommend that you watch your run.
2.   Press "ALARM ACK" if the O2 alarm goes off (O2 should then return 
to the recipe set point).
3.   Make a comment on coral with the recipe name, step number, step time.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




More information about the tylanbpsg mailing list