TylanBPSG has an intermittent issue with O2 flow

Robin King robinhmb at yahoo.com
Fri Jul 9 14:48:05 PDT 2010


Thanks Maurice.  Is anyone seeing Si particles in their films when this happens?



--- On Fri, 7/9/10, maurice stevens <maurice at stanford.edu> wrote:

> From: maurice stevens <maurice at stanford.edu>
> Subject: TylanBPSG has an intermittent issue with O2 flow
> To: tylanbpsg at snf.stanford.edu
> Date: Friday, July 9, 2010, 12:00 PM
> The output connections have been
> checked and the MFC has been replaced. We are continuing to
> monitor this tube.
> 
> If you choose to use TylanBPSG before we have resolve this
> problem:
> 
> 1.   We strongly recommend that you watch
> your run.
> 2.   Press "ALARM ACK" if the O2 alarm goes
> off (O2 should then return to the recipe set point).
> 3.   Make a comment on coral with the recipe
> name, step number, step time.
> 
> 
> 
> -- maurice at stanford.edu
> 
> Maurice Stevens
> Stanford Nanofabrication Facility
> CIS Room 142, Mail Code 4070
> Stanford, CA  94305
> P. (650)725-3660
> F. (650)725.6278
> 
> 



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