From ludwig.galambos at gmail.com Wed Sep 1 18:06:38 2010 From: ludwig.galambos at gmail.com (Ludwig G.) Date: Wed, 1 Sep 2010 18:06:38 -0700 Subject: release 10AM BPSG Message-ID: Released BPSG on Thursday between 10AM-1pm Our process Results are good but during the deposition we had an MFZ error,..aka gas flow. Ted was on site to the rescue Make sure that you are present during that time, otherwise the results might not be so good -------------- next part -------------- An HTML attachment was scrubbed... URL: From nharjee at stanford.edu Mon Sep 6 12:39:35 2010 From: nharjee at stanford.edu (Nahid Harjee) Date: Mon, 6 Sep 2010 12:39:35 -0700 Subject: tylanbpsg free today 14:30-18:30 Message-ID: User haemmerl had to fly home urgently and could not delete the reservation in Coral. -- Nahid Harjee Ph.D. Candidate Electrical Engineering Stanford University 408-761-8651 -------------- next part -------------- An HTML attachment was scrubbed... URL: From chienyuc at stanford.edu Tue Sep 7 01:48:14 2010 From: chienyuc at stanford.edu (Chien-Yu Chen) Date: Tue, 7 Sep 2010 01:48:14 -0700 (PDT) Subject: tylanbpsg reservation release Tue 1600-2100 Message-ID: <310586669.1961.1283849294799.JavaMail.root@zm03.stanford.edu> Done at earlier slots. From kokab at stanford.edu Tue Sep 7 12:41:53 2010 From: kokab at stanford.edu (Kokab Baghbani) Date: Tue, 7 Sep 2010 12:41:53 -0700 (PDT) Subject: tylanbpsg is free now In-Reply-To: <47732284.279987.1283888349114.JavaMail.root@zm01.stanford.edu> Message-ID: <1933051013.280022.1283888513722.JavaMail.root@zm01.stanford.edu> From kyunglok at stanford.edu Tue Sep 14 10:47:18 2010 From: kyunglok at stanford.edu (Kyunglok Kim) Date: Tue, 14 Sep 2010 10:47:18 -0700 (PDT) Subject: Reservation released from 2pm to 4:30pm today Message-ID: <2095870034.65833.1284486438148.JavaMail.root@zm03.stanford.edu> Sorry for the late reply. Sample cannot be ready by that time. -Kyunglok From maurice at stanford.edu Thu Sep 16 16:32:04 2010 From: maurice at stanford.edu (maurice stevens) Date: Thu, 16 Sep 2010 16:32:04 -0700 Subject: Tube free til 7:00pm Message-ID: <4C92A8F4.6070401@stanford.edu> Users wafers are not ready -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From jasonlin at stanford.edu Sat Sep 18 00:26:36 2010 From: jasonlin at stanford.edu (J. Jason Lin) Date: Sat, 18 Sep 2010 00:26:36 -0700 Subject: tylanbpsg released Sat noon Message-ID: Samples failed -------------- next part -------------- An HTML attachment was scrubbed... URL: From jasonlin at stanford.edu Tue Sep 21 17:25:37 2010 From: jasonlin at stanford.edu (J. Jason Lin) Date: Tue, 21 Sep 2010 17:25:37 -0700 Subject: tylanbpsg finished early Message-ID: Will be done in 10 minutes or so. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Fri Sep 24 16:16:44 2010 From: maurice at stanford.edu (maurice stevens) Date: Fri, 24 Sep 2010 16:16:44 -0700 Subject: Tylanbpsg down for weekend Message-ID: <4C9D315C.2080502@stanford.edu> TylanBPSG will be down for the weekend. The new tube is not pumping down and may have to go back to the vendor. We hope to have the system back together late Monday. We will send out an update Monday. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Mon Sep 27 16:46:43 2010 From: maurice at stanford.edu (maurice stevens) Date: Mon, 27 Sep 2010 16:46:43 -0700 Subject: Tylanbpsg update In-Reply-To: <4C9D315C.2080502@stanford.edu> References: <4C9D315C.2080502@stanford.edu> Message-ID: <4CA12CE3.6050206@stanford.edu> BPSG will be down tonight...but tomorrow is looking good. Ray has the tube in and it is up to temperate. He will check the leak rate on it tomorrow, coat it if the leak rate is good and then throw it to me for a test. If all goes smoothly, the tube could be up after lunch. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Tue Sep 28 16:29:58 2010 From: maurice at stanford.edu (maurice stevens) Date: Tue, 28 Sep 2010 16:29:58 -0700 Subject: Tylanbpsg update In-Reply-To: <4CA12CE3.6050206@stanford.edu> References: <4C9D315C.2080502@stanford.edu> <4CA12CE3.6050206@stanford.edu> Message-ID: <4CA27A76.4060100@stanford.edu> BPSG will be down tonight. The leak rate on the tube put in yesterday was not good. Ray had to pull the tube and readjust the fittings. Tube is in. It is leaktight. Tomorrow it will be heated up and leak checked. On 9/27/2010 4:46 PM, maurice stevens wrote: > BPSG will be down tonight...but tomorrow is looking good. > > Ray has the tube in and it is up to temperate. He will check the leak > rate on it tomorrow, coat it if the leak rate is good and then throw > it to me for a test. > > If all goes smoothly, the tube could be up after lunch. > > -m > > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Wed Sep 29 16:04:13 2010 From: maurice at stanford.edu (maurice stevens) Date: Wed, 29 Sep 2010 16:04:13 -0700 Subject: BPSG up Message-ID: <4CA3C5ED.1040806@stanford.edu> Ray has TylanBPSG back up. I ran the LTO400PC recipe for 00:20:00 and expected 2600ang. I actually got only 2330 ang. This is not a huge difference but if you thickness is critical you should run a test run first. I will run another test early next week to see if there is any change. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278