maurice stevens maurice at stanford.edu
Wed Sep 29 16:04:13 PDT 2010

  Ray has TylanBPSG back up.
I ran the LTO400PC recipe for 00:20:00 and expected 2600ang.  I actually 
got only 2330 ang.
This is not a huge difference but if you thickness is critical you 
should run a test run first.
I will run another test early next week to see if there is any change.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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