BPSG up

maurice stevens maurice at stanford.edu
Wed Sep 29 16:04:13 PDT 2010


  Ray has TylanBPSG back up.
I ran the LTO400PC recipe for 00:20:00 and expected 2600ang.  I actually 
got only 2330 ang.
This is not a huge difference but if you thickness is critical you 
should run a test run first.
I will run another test early next week to see if there is any change.

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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