From maurice at stanford.edu Wed Apr 6 11:13:14 2011 From: maurice at stanford.edu (maurice stevens) Date: Wed, 06 Apr 2011 11:13:14 -0700 Subject: TylanBPSG intermittent O2 problem: update Message-ID: <4D9CAD3A.4020306@stanford.edu> Ray has changed a component in the O2 portion of the controller. We hope this has fixed the intermittent O2 issue that we have had for months. We are clearing the old reports of O2 MFS errors from coral and ask you all to report any new issues you see (we know that once it is reported a few time users don't see the need of reporting a documented problem). We still recommend that you monitor your whole deposition...and require that you record your deposition pressure in the logbook. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From jasonlin at stanford.edu Tue Apr 19 04:21:08 2011 From: jasonlin at stanford.edu (J. Jason Lin) Date: Tue, 19 Apr 2011 04:21:08 -0700 Subject: tylanbpsg free today 4pm - 9pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: