From sgchong at stanford.edu Tue Aug 9 12:28:53 2011 From: sgchong at stanford.edu (Soogine Chong) Date: Tue, 9 Aug 2011 12:28:53 -0700 (PDT) Subject: Insufficient number of nonmetal dummy wafers Message-ID: <2006720221.1046162.1312918133053.JavaMail.root@zm07.stanford.edu> Hi, I was not able to do my run, because I didn't have enough nonmetal dummy wafers. There were empty spaces for about five wafers in the boat. I had two wafers to process, and there weren't any dummies in the dummy boxes. Are the wafers somewhere where I couldn't find them, or do we need to get more dummy wafers? I saw that Chen and Jaehyung had stripped oxide two/three runs ago. Did you have more dummy wafers back then? Thanks, Soogine. -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From cchen86 at stanford.edu Tue Aug 9 12:44:30 2011 From: cchen86 at stanford.edu (Chen Chen) Date: Tue, 9 Aug 2011 12:44:30 -0700 Subject: Insufficient number of nonmetal dummy wafers In-Reply-To: <2006720221.1046162.1312918133053.JavaMail.root@zm07.stanford.edu> References: <2006720221.1046162.1312918133053.JavaMail.root@zm07.stanford.edu> Message-ID: Hi, Soogine, When I did the dummy strip, the dummy wafer boxes were empty. Those dummies in the tube were all that I could find. Thanks, Chen -----Original Message----- From: Soogine Chong Sent: Tuesday, August 09, 2011 12:28 PM To: tylanbpsg at snf.stanford.edu ; maurice at stanford.edu Subject: Insufficient number of nonmetal dummy wafers Hi, I was not able to do my run, because I didn't have enough nonmetal dummy wafers. There were empty spaces for about five wafers in the boat. I had two wafers to process, and there weren't any dummies in the dummy boxes. Are the wafers somewhere where I couldn't find them, or do we need to get more dummy wafers? I saw that Chen and Jaehyung had stripped oxide two/three runs ago. Did you have more dummy wafers back then? Thanks, Soogine. -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From maurice at stanford.edu Fri Aug 12 13:40:48 2011 From: maurice at stanford.edu (Maurice M Stevens) Date: Fri, 12 Aug 2011 13:40:48 -0700 (PDT) Subject: tylanbpsg: System down for the weekend In-Reply-To: <20110812203837.AD3A1456DF6@smtp-unencrypted.stanford.edu> Message-ID: <2044385210.594512.1313181648590.JavaMail.root@zm03.stanford.edu> ----- Forwarded Message ----- From: tberg at snf.stanford.edu To: tylanbpsg-pcs at snf.stanford.edu Sent: Friday, August 12, 2011 1:38:37 PM Subject: Comment tylanbpsg SNF 2011-08-12 13:38:37: System down for the weekend System down for the weekend. Still checkijng out exhaust. Pump changed and all fittings checked. Checked exhaust line to burn box. Ted From bwchui at yahoo.com Fri Aug 19 14:09:09 2011 From: bwchui at yahoo.com (Benjamin Chui) Date: Fri, 19 Aug 2011 14:09:09 -0700 (PDT) Subject: LTO free today 1600-2000 Message-ID: <1313788149.82185.YahooMailNeo@web36502.mail.mud.yahoo.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From sclaussen at stanford.edu Sun Aug 21 16:39:22 2011 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Sun, 21 Aug 2011 16:39:22 -0700 Subject: tylanbpsg available Monday, 7:30-10pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Tue Aug 23 09:00:24 2011 From: maurice at stanford.edu (maurice stevens) Date: Tue, 23 Aug 2011 09:00:24 -0700 Subject: update Message-ID: <4E53CE98.4050009@stanford.edu> After getting slammed last week (pump issue, broken quartz injectors, cracked tube) and finally get the tube up for the weekend, we started this week with more broken quartz (both quartz sheaths broken). We will get a delivery from our quartz vendor this morning and we can then again assemble the tube. If all goes well we could be up midday tomorrow. But with the luck we are having... -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Tue Aug 23 16:53:07 2011 From: maurice at stanford.edu (Maurice M Stevens) Date: Tue, 23 Aug 2011 16:53:07 -0700 (PDT) Subject: Needs a test Message-ID: <1748504154.800085.1314143587594.JavaMail.root@zm03.stanford.edu> BPSG is back together and has been coated. It needs a test. If someone wants to run it at their own risk they can. I am planning to run a test in the morning. From bwchui at yahoo.com Tue Aug 23 17:49:13 2011 From: bwchui at yahoo.com (Benjamin Chui) Date: Tue, 23 Aug 2011 17:49:13 -0700 (PDT) Subject: Needs a test In-Reply-To: <1748504154.800085.1314143587594.JavaMail.root@zm03.stanford.edu> References: <1748504154.800085.1314143587594.JavaMail.root@zm03.stanford.edu> Message-ID: <1314146953.28237.YahooMailNeo@web36507.mail.mud.yahoo.com> Thanks Maurice for the update!? I'm about to do a test run to grow 1 micron LTO400PC.? Will let you know the results... Ben ________________________________ From: Maurice M Stevens To: tylanbpsg at snf.stanford.edu Sent: Tuesday, August 23, 2011 4:53 PM Subject: Needs a test BPSG is back together and has been coated.? It needs a test. If someone wants to run it at their own risk they can.? I am planning to run a test in the morning. -------------- next part -------------- An HTML attachment was scrubbed... URL: From cachang at stanford.edu Wed Aug 24 09:43:57 2011 From: cachang at stanford.edu (Chia-Ming Chang) Date: Wed, 24 Aug 2011 09:43:57 -0700 (PDT) Subject: tylanbpsg release now-11:30am Message-ID: <1765886224.976952.1314204237603.JavaMail.root@zm06.stanford.edu> Sorry for the late notice. Wafers not ready From maurice at stanford.edu Thu Aug 25 10:19:33 2011 From: maurice at stanford.edu (maurice stevens) Date: Thu, 25 Aug 2011 10:19:33 -0700 Subject: free until 13:00 Message-ID: <4E568425.5050805@stanford.edu> Finished testing early. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From zguo at stanford.edu Mon Aug 29 01:13:27 2011 From: zguo at stanford.edu (Zhiqiang Guo) Date: Mon, 29 Aug 2011 01:13:27 -0700 (PDT) Subject: 10:30am Monday slot released Message-ID: <1643085400.391850.1314605607747.JavaMail.root@zm01.stanford.edu>