Insufficient number of nonmetal dummy wafers
sgchong at stanford.edu
Tue Aug 9 12:28:53 PDT 2011
I was not able to do my run, because I didn't have enough nonmetal dummy wafers. There were empty spaces for about five wafers in the boat. I had two wafers to process, and there weren't any dummies in the dummy boxes.
Are the wafers somewhere where I couldn't find them, or do we need to get more dummy wafers?
I saw that Chen and Jaehyung had stripped oxide two/three runs ago. Did you have more dummy wafers back then?
PhD candidate in Electrical Engineering
e-mail: sgchong at stanford.edu
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