Insufficient number of nonmetal dummy wafers

Chen Chen cchen86 at stanford.edu
Tue Aug 9 12:44:30 PDT 2011


Hi, Soogine,

When I did the dummy strip, the dummy wafer boxes were empty. Those dummies 
in the tube were all that I could find.

Thanks,

Chen

-----Original Message----- 
From: Soogine Chong
Sent: Tuesday, August 09, 2011 12:28 PM
To: tylanbpsg at snf.stanford.edu ; maurice at stanford.edu
Subject: Insufficient number of nonmetal dummy wafers

Hi,

I was not able to do my run, because I didn't have enough nonmetal dummy 
wafers.  There were empty spaces for about five wafers in the boat.  I had 
two wafers to process, and there weren't any dummies in the dummy boxes.

Are the wafers somewhere where I couldn't find them, or do we need to get 
more dummy wafers?

I saw that Chen and Jaehyung had stripped oxide two/three runs ago.  Did you 
have more dummy wafers back then?

Thanks,
Soogine.

-- 
Soogine Chong
Stanford University
PhD candidate in Electrical Engineering
e-mail: sgchong at stanford.edu
mobile: +1-650-804-8556 




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