Insufficient number of nonmetal dummy wafers
cchen86 at stanford.edu
Tue Aug 9 12:44:30 PDT 2011
When I did the dummy strip, the dummy wafer boxes were empty. Those dummies
in the tube were all that I could find.
From: Soogine Chong
Sent: Tuesday, August 09, 2011 12:28 PM
To: tylanbpsg at snf.stanford.edu ; maurice at stanford.edu
Subject: Insufficient number of nonmetal dummy wafers
I was not able to do my run, because I didn't have enough nonmetal dummy
wafers. There were empty spaces for about five wafers in the boat. I had
two wafers to process, and there weren't any dummies in the dummy boxes.
Are the wafers somewhere where I couldn't find them, or do we need to get
more dummy wafers?
I saw that Chen and Jaehyung had stripped oxide two/three runs ago. Did you
have more dummy wafers back then?
PhD candidate in Electrical Engineering
e-mail: sgchong at stanford.edu
More information about the tylanbpsg