From zzp at stanford.edu Fri May 4 08:40:13 2012 From: zzp at stanford.edu (Zhiping Zhang) Date: Fri, 4 May 2012 08:40:13 -0700 (PDT) Subject: Status of the burnbox? Message-ID: Could someone please give us an update on that? Thanks, Zhiping -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Fri May 4 09:29:49 2012 From: maurice at stanford.edu (maurice stevens) Date: Fri, 04 May 2012 09:29:49 -0700 Subject: Status of the burnbox? In-Reply-To: References: Message-ID: <4FA403FD.8000003@stanford.edu> We are installing interlocks on all the Tylan LPCVDs so that if there is a burn box alarm all process gases to the tube will be shutoff. We expect to have this part complete today. We will test the interlocks today (if time permits) and Monday. We are also looking at logged tylan data to see if we can narrow the burnbox problems to one tube. We believe we will need to modify some of the poly recipes to make the burn box safer. We hope to be running all the LPs by Wed. -m On 5/4/2012 8:40 AM, Zhiping Zhang wrote: > > Could someone please give us an update on that? > > Thanks, > > Zhiping > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Wed May 23 11:33:31 2012 From: maurice at stanford.edu (Maurice M Stevens) Date: Wed, 23 May 2012 11:33:31 -0700 (PDT) Subject: Abort step in BPSG recipes In-Reply-To: <20120523181812.6A2E418B3D1@smtp-unencrypted.stanford.edu> Message-ID: <1881878396.53223411.1337798011821.JavaMail.root@zm03.stanford.edu> Hi TylanBPSG users, There is a new BPSG disk. It currently has 5 recipes. LTO300PC LTO350PC LTO400PC PSG400 PUMP11 If you need additional recipes let me know. These recipes have an addition abort step added. If the tube is disabled or if the burnbox fails in a step that has O2, SiH4 or PH3 then the recipe will abort, shut off process gases (O2, SiH4,PH3), pump for 5 min and then hold in N2. The hold step is called "ABORT PURGE/HOLD". You will now know that your process was interrupted. Pressing alarm ack will release the recipe hold, purge the tube in N2, and then vent the tube. Please contact me or Ted if any of this is not clear. -m