From amol at snf.stanford.edu Sat Dec 1 11:50:34 2001 From: amol at snf.stanford.edu (amol at snf.stanford.edu) Date: Dec 1, 2001 11:50:34 PM Subject: Shutdown tylanfga 2001-12-01 23:50:33: Small explosion (H2?) Message-ID: Small explosion (probably small amount of H2) was heard when I aborted my FGA550 process in order to unload my wafers. Please check if tube is intact. My wafers and boats were OK. From gladys at snf.stanford.edu Mon Dec 3 09:57:31 2001 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Dec 3, 2001 9:57:31 AM Subject: Shutdown tylanfga 2001-12-01 23:50:33: Small explosion (H2?) testrun was ok Message-ID: