Shutdown tylanfga 2001-12-01 23:50:33: Small explosion (H2?)

amol at snf.stanford.edu amol at snf.stanford.edu
Sat Dec 1 11:50:34 PST 2001


Small explosion (probably small amount of H2) was heard when I aborted my FGA550 process in order to unload my wafers. Please check if tube is intact. My wafers and boats were OK.




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