Problem tylanfga SNF 2004-07-14 11:25:08: wafer film particles broken inside furnace

wtpark at snf.stanford.edu wtpark at snf.stanford.edu
Wed Jul 14 11:25:10 PDT 2004


during when the boat got inside the furnace, some of my films "pop"ed away from the wafer.
Furnace needs cleaning.
Sorry.




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