Shutdown tylanfga SNF 2006-01-20 10:52:35: changing N2 and H2 zero pots

seymour at snf.stanford.edu seymour at snf.stanford.edu
Tue Jan 24 15:21:37 PST 2006


replaced faulty sensor for H2 and the N2 and H2 zero trim pots. flowed both gases to setpoint for 1 hour and rechecked zero's. did the MFS460 auto routine. System is up




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