Problem tylanfga SNF 2006-06-27 01:04:08: NH3 Flow in tube?

pethe at snf.stanford.edu pethe at snf.stanford.edu
Tue Jun 27 01:04:09 PDT 2006


Tried to run FGA400 in tube. The NH3 should not be turned on during the recipe. However, a constant flow of 6.1sccm NH3 ws observed throughout the run




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