Problem tylanfga SNF 2006-06-27 01:04:08: NH3 Flow in tube?

pethe at pethe at
Tue Jun 27 01:04:09 PDT 2006

Tried to run FGA400 in tube. The NH3 should not be turned on during the recipe. However, a constant flow of 6.1sccm NH3 ws observed throughout the run

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