From maurice at snf.stanford.edu Thu Jul 3 09:55:50 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Jul 2008 09:55:50 -0700 Subject: Shutdown tylanfga SNF 2008-07-03 09:55:50: Possible contamination Message-ID: User report From maurice at snf.stanford.edu Thu Jul 3 11:23:45 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 3 Jul 2008 11:23:45 -0700 Subject: Shutdown tylanfga SNF 2008-07-03 11:23:45: Pull/clean after metal contamination Message-ID: User reports that his wafer was metal contaminated From seymour at snf.stanford.edu Mon Jul 7 15:22:26 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 7 Jul 2008 15:22:26 -0700 Subject: Shutdown tylanfga SNF 2008-07-03 11:23:45: Pull/clean after metal contamination Message-ID: Pulled and cleaned all quartz ware. Reassembled the tube and turned on element breaker. checked door interlock on the Tycom controller to assure the door flag was made. tube is ready to use. From seymour at snf.stanford.edu Mon Jul 7 15:23:22 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 7 Jul 2008 15:23:22 -0700 Subject: Shutdown tylanfga SNF 2008-07-03 09:55:50: Possible contamination Message-ID: all quartz ware cleaned and reassembled. From seymour at snf.stanford.edu Mon Jul 7 15:27:01 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 7 Jul 2008 15:27:01 -0700 Subject: Problem tylanfga SNF 2008-07-07 15:26:59: tube pull and clean completed. Message-ID: The element is coming up to idle temp. I have checked loader operation. There may be a process test needed, but if it heats and the gas flows and pulls and pushes coorrectly I think that covers everything. From vincentcyw at snf.stanford.edu Wed Jul 9 15:17:14 2008 From: vincentcyw at snf.stanford.edu (vincentcyw at snf.stanford.edu) Date: Wed, 9 Jul 2008 15:17:14 -0700 Subject: Comment tylanfga SNF 2008-07-09 15:17:13: Test Run -- Good Message-ID: Just tried FGA400 anneal. Everything worked out without any problems. From tberg at snf.stanford.edu Thu Jul 10 06:12:39 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 10 Jul 2008 06:12:39 -0700 Subject: Problem tylanfga SNF 2008-07-07 15:26:59: tube pull and clean completed. Message-ID: tested goodtested good From tberg at snf.stanford.edu Thu Jul 10 06:12:52 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 10 Jul 2008 06:12:52 -0700 Subject: Comment tylanfga SNF 2008-07-09 15:17:13: Test Run -- Good Message-ID: tested good