From skoh at snf.stanford.edu  Tue Jun  3 13:39:41 2008
From: skoh at snf.stanford.edu (skoh at snf.stanford.edu)
Date: Tue, 3 Jun 2008 13:39:41 -0700
Subject: Problem tylanfga SNF 2008-06-03 13:39:41: Possible NH3 flow error in tube
Message-ID: <mailman.73.1356283745.5023.tylanfga-pcs@snf.stanford.edu>

Ran FGA300 in tube. The NH3 should not be turned on during the recipe.  A constant flow of 7.3sccm NH3 was, however, observed throughout the run



From seymour at snf.stanford.edu  Tue Jun  3 14:41:44 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 3 Jun 2008 14:41:44 -0700
Subject: Comment tylanfga SNF 2008-06-03 14:41:43: checked out system
Message-ID: <mailman.74.1356283745.5023.tylanfga-pcs@snf.stanford.edu>

The ammonia MFC was at zero on the MFS460 and the Tycom status of the tube showed zero setpoint and zero flow.



From caner at snf.stanford.edu  Thu Jun 12 18:27:25 2008
From: caner at snf.stanford.edu (caner at snf.stanford.edu)
Date: Thu, 12 Jun 2008 18:27:25 -0700
Subject: Problem tylanfga SNF 2008-06-12 18:27:24: nh3 flow problem
Message-ID: <mailman.75.1356283745.5023.tylanfga-pcs@snf.stanford.edu>

Similar problem as Serene. I ran fga400 and observed a 1.2 nh3 flow readout. 



From seymour at snf.stanford.edu  Fri Jun 13 11:57:42 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 13 Jun 2008 11:57:42 -0700
Subject: Shutdown tylanfga SNF 2008-06-13 11:57:41: 
Message-ID: <mailman.76.1356283745.5023.tylanfga-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Fri Jun 13 11:57:59 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 13 Jun 2008 11:57:59 -0700
Subject: Shutdown tylanfga SNF 2008-06-13 11:57:41: 
Message-ID: <mailman.77.1356283745.5023.tylanfga-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Fri Jun 13 11:59:16 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 13 Jun 2008 11:59:16 -0700
Subject: Problem tylanfga SNF 2008-06-12 18:27:24: nh3 flow problem
Message-ID: <mailman.78.1356283745.5023.tylanfga-pcs@snf.stanford.edu>

checked and adjusted MFC zero with no flow. ran auto zero routine and checked tycom all ok now



From seymour at snf.stanford.edu  Fri Jun 13 12:00:39 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 13 Jun 2008 12:00:39 -0700
Subject: Problem tylanfga SNF 2008-06-03 13:39:41: Possible NH3 flow error in tube
Message-ID: <mailman.79.1356283745.5023.tylanfga-pcs@snf.stanford.edu>

mfc zero off, adjusted and checked operation.



From seymour at snf.stanford.edu  Fri Jun 13 12:03:07 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 13 Jun 2008 12:03:07 -0700
Subject: Comment tylanfga SNF 2008-06-03 14:41:43: checked out system
Message-ID: <mailman.80.1356283745.5023.tylanfga-pcs@snf.stanford.edu>

looked at all three MFC ZEROS and adjusted where needed.