Problem tylanfga SNF 2008-06-03 13:39:41: Possible NH3 flow error in tube

skoh at snf.stanford.edu skoh at snf.stanford.edu
Tue Jun 3 13:39:41 PDT 2008


Ran FGA300 in tube. The NH3 should not be turned on during the recipe.  A constant flow of 7.3sccm NH3 was, however, observed throughout the run




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