From slcheng at snf.stanford.edu  Fri Jun  4 00:11:43 2010
From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu)
Date: Fri, 4 Jun 2010 00:11:43 -0700
Subject: Problem tylanfga SNF 2010-06-04 00:11:42: huge noise when tube going in.
Message-ID: <mailman.115.1356283745.5023.tylanfga-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Fri Jun  4 06:37:13 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 4 Jun 2010 06:37:13 -0700
Subject: Comment tylanfga SNF 2010-06-04 06:37:13: bad motor
Message-ID: <mailman.116.1356283745.5023.tylanfga-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Fri Jun  4 07:38:33 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 4 Jun 2010 07:38:33 -0700
Subject: Problem tylanfga SNF 2010-06-04 00:11:42: huge noise when tube going in.
Message-ID: <mailman.117.1356283745.5023.tylanfga-pcs@snf.stanford.edu>

ted replaced loader mottor. 
checks ok



From seymour at snf.stanford.edu  Fri Jun  4 07:38:54 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 4 Jun 2010 07:38:54 -0700
Subject: Comment tylanfga SNF 2010-06-04 06:37:13: bad motor
Message-ID: <mailman.118.1356283745.5023.tylanfga-pcs@snf.stanford.edu>

motor replaced



From gth at snf.stanford.edu  Mon Jun 14 15:25:59 2010
From: gth at snf.stanford.edu (gth at snf.stanford.edu)
Date: Mon, 14 Jun 2010 15:25:59 -0700
Subject: Problem tylanfga SNF 2010-06-14 15:25:59: dirt on the wafer.
Message-ID: <mailman.119.1356283745.5023.tylanfga-pcs@snf.stanford.edu>

I loaded a Si wafer with 30nm LTO SiO2 and capped with 100nm Aluminum in the FGA tube. Wafer was unpatterned.
FGA 400, 30min
The wafers face was facing the back of the tube.
I got the entire wafer covered with dirt on Aluminum.
Either the tube is dirty or the gas lines are dirty.
Please check.
To reproduce the problem, I recommend loading a dummy from Gryphon the way I did.



From maurice at snf.stanford.edu  Wed Jun 16 15:25:55 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 16 Jun 2010 15:25:55 -0700
Subject: Comment tylanfga SNF 2010-06-16 15:25:54: running  FGA400 test
Message-ID: <mailman.120.1356283745.5023.tylanfga-pcs@snf.stanford.edu>

Running FGA400  00:15:00 on clean oxide wafer.  
Will inspect for "dirt".



From maurice at snf.stanford.edu  Wed Jun 16 17:13:25 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 16 Jun 2010 17:13:25 -0700
Subject: Comment tylanfga SNF 2010-06-16 15:25:54: running  FGA400 test
Message-ID: <mailman.121.1356283745.5023.tylanfga-pcs@snf.stanford.edu>

Ran 2 test. Both FGA400 00:15:00.
First test was with a 1550 ang oxide wafer.
Second test was a 1um Al on oxide.
Both wafers were facing the source.
Both wafers looked clean.



From maurice at snf.stanford.edu  Thu Jun 17 10:11:16 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 17 Jun 2010 10:11:16 -0700
Subject: Problem tylanfga SNF 2010-06-14 15:25:59: dirt on the wafer.
Message-ID: <mailman.122.1356283745.5023.tylanfga-pcs@snf.stanford.edu>

Ran 2 test. Both FGA400 00:15:00.
First test was with a 1550 ang oxide wafer.
Second test was a 1um Al on oxide.
Both wafers were facing the source.
Both wafers looked clean after anneal.
Will contact user Gth to see his wafers.