Problem tylanfga SNF 2010-06-14 15:25:59: dirt on the wafer.

gth at snf.stanford.edu gth at snf.stanford.edu
Mon Jun 14 15:25:59 PDT 2010


I loaded a Si wafer with 30nm LTO SiO2 and capped with 100nm Aluminum in the FGA tube. Wafer was unpatterned.
FGA 400, 30min
The wafers face was facing the back of the tube.
I got the entire wafer covered with dirt on Aluminum.
Either the tube is dirty or the gas lines are dirty.
Please check.
To reproduce the problem, I recommend loading a dummy from Gryphon the way I did.




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