Problem tylanfga SNF 2010-06-14 15:25:59: dirt on the wafer.

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Jun 17 10:11:16 PDT 2010


Ran 2 test. Both FGA400 00:15:00.
First test was with a 1550 ang oxide wafer.
Second test was a 1um Al on oxide.
Both wafers were facing the source.
Both wafers looked clean after anneal.
Will contact user Gth to see his wafers.




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