Problem tylanfga SNF 2010-06-14 15:25:59: dirt on the wafer.

[maurice at snf.stanford.edu]

Ran 2 test. Both FGA400 00:15:00.
First test was with a 1550 ang oxide wafer.
Second test was a 1um Al on oxide.
Both wafers were facing the source.
Both wafers looked clean after anneal.
Will contact user Gth to see his wafers.