Problem tylanfga SNF 2010-03-18 10:38:37: found tube open

seymour at snf.stanford.edu seymour at snf.stanford.edu
Thu Mar 18 10:38:38 PDT 2010


cycle was at end. no wafers on loader. Pushed alars silance and tube closed. NO HISTORY OF A USER TODAY OR YESTERDAY




More information about the tylanfga-pcs mailing list