From mbartsch at Stanford.EDU  Tue May 30 14:44:03 2000
From: mbartsch at Stanford.EDU (Michael S. Bartsch)
Date: Tue, 30 May 2000 14:44:03 -0700 (PDT)
Subject: Tylanfga problem report?
Message-ID: <200005302144.OAA21277@myth3.Stanford.EDU>

Hi,

Lian posted a problem report for the tylanfga, but there is no indication
of what is wrong.  Yet another annoyance built into the new Coral system.  
Could one of the technicians please chime in and explain what the nature
of the problem is and whether it is bad enough that I should not process
my wafers?  The end of the month is tomorrow and the FGA is my last
process step, so a quick reply would be a big help.  Thanks!

Mike


From lian at Stanford.EDU  Tue May 30 18:44:35 2000
From: lian at Stanford.EDU (Lian Zhang)
Date: Tue, 30 May 2000 18:44:35 -0700 (PDT)
Subject: Tylanfga problem report?
In-Reply-To: <200005302144.OAA21277@myth3.Stanford.EDU> from "Michael S. Bartsch" at May 30, 2000 02:44:03 PM
Message-ID: <200005310144.SAA12923@myth5.Stanford.EDU>

When I ran it last weekend, it took about 30min for the tube to move
in or out.  To me it's unusually long.  But the annealing was ok.

Lian

> 
> Hi,
> 
> Lian posted a problem report for the tylanfga, but there is no indication
> of what is wrong.  Yet another annoyance built into the new Coral system.  
> Could one of the technicians please chime in and explain what the nature
> of the problem is and whether it is bad enough that I should not process
> my wafers?  The end of the month is tomorrow and the FGA is my last
> process step, so a quick reply would be a big help.  Thanks!
> 
> Mike
>