From seymour at snf.stanford.edu  Wed Dec  6 07:26:21 2000
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Dec 6, 2000 7:26:21 AM
Subject: Shutdown tylannitride: 
Message-ID: <mailman.43.1357938946.26006.tylannitride-pcs@snf.stanford.edu>

SiH4 cylinder needs changing



From seymour at snf.stanford.edu  Wed Dec  6 10:20:37 2000
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Dec 6, 2000 10:20:37 AM
Subject: Shutdown tylannitride: shutdown cleared
Message-ID: <mailman.44.1357938946.26006.tylannitride-pcs@snf.stanford.edu>

my mistake putting this down this morning, as it doesn't need Silane. 



From plong at snf.stanford.edu  Mon Dec 11 11:10:55 2000
From: plong at snf.stanford.edu (plong at snf.stanford.edu)
Date: Dec 11, 2000 11:10:55 AM
Subject: Shutdown tylannitride: high leak rate
Message-ID: <mailman.45.1357938946.26006.tylannitride-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Wed Dec 13 04:01:55 2000
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Dec 13, 2000 4:01:55 PM
Subject: Shutdown tylannitride 2000-12-11 11:10:53: The system leak rate is good system up
Message-ID: <mailman.46.1357938946.26006.tylannitride-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Mon Dec 18 07:40:01 2000
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Dec 18, 2000 7:40:01 AM
Subject: Shutdown tylannitride 2000-12-18 07:39:59: 
Message-ID: <mailman.47.1357938946.26006.tylannitride-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Mon Dec 18 09:23:19 2000
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Dec 18, 2000 9:23:19 AM
Subject: Shutdown tylannitride 2000-12-18 07:39:59: burnbox clean completed   ok to run
Message-ID: <mailman.48.1357938946.26006.tylannitride-pcs@snf.stanford.edu>