From caudillo at snf.stanford.edu  Fri Nov  3 12:58:04 2000
From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu)
Date: Nov 3, 2000 12:58:04 PM
Subject: Shutdown tylannitride: Run away temp. B tc 
Message-ID: <mailman.35.1357938946.26006.tylannitride-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Fri Nov  3 01:21:57 2000
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Nov 3, 2000 1:21:57 PM
Subject: Shutdown Clear tylannitride: system controlling ok at this time, will monitor
Message-ID: <mailman.36.1357938946.26006.tylannitride-pcs@snf.stanford.edu>




From rcrane at snf.stanford.edu  Wed Nov 22 05:35:09 2000
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Nov 22, 2000 5:35:09 PM
Subject: Problem tylannitride: Boat won't come out by itself
Message-ID: <mailman.39.1357938946.26006.tylannitride-pcs@snf.stanford.edu>

Bad gate face. Resurface and checked.



From rcrane at snf.stanford.edu  Wed Nov 22 05:36:29 2000
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Nov 22, 2000 5:36:29 PM
Subject: Shutdown tylannitride: system shutdown
Message-ID: <mailman.40.1357938946.26006.tylannitride-pcs@snf.stanford.edu>

rebuild gate valve



From pzwahlen at snf.stanford.edu  Mon Nov 27 07:08:06 2000
From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu)
Date: Nov 27, 2000 7:08:06 PM
Subject: Problem tylannitride: Only 1 test wafer in the boat
Message-ID: <mailman.41.1357938946.26006.tylannitride-pcs@snf.stanford.edu>

There is currently only one test wafer in the boat. This is not a concern for people running 1-side process, but it's kind of annoying for people like me doing double side processing.



From jgarate at snf.stanford.edu  Tue Nov 28 09:04:24 2000
From: jgarate at snf.stanford.edu (jgarate at snf.stanford.edu)
Date: Nov 28, 2000 9:04:24 AM
Subject: Problem tylannitride: Added the rest of the dummy wafers.
Message-ID: <mailman.42.1357938946.26006.tylannitride-pcs@snf.stanford.edu>