Problem tylannitride: Only 1 test wafer in the boat

pzwahlen at snf.stanford.edu pzwahlen at snf.stanford.edu
Mon Nov 27 07:08:06 PST 2000


There is currently only one test wafer in the boat. This is not a concern for people running 1-side process, but it's kind of annoying for people like me doing double side processing.




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