From gladys at snf.stanford.edu Tue Aug 7 05:04:48 2001 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Aug 7, 2001 5:04:48 PM Subject: Shutdown tylannitride 2001-08-07 17:04:46: tylannitride:shutdown for cleaning Message-ID: From latta at snf.stanford.edu Wed Aug 8 04:15:40 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 8, 2001 4:15:40 PM Subject: Shutdown tylannitride 2001-08-07 17:04:46: tylannitride:shutdown for cleaning Message-ID: System run w/o wafers to verify gas flows. Ok. LONH378 run for 60:00- dep rate about 32A/min. Ok. Refractive index and stress measurements will be posted soon. From latta at snf.stanford.edu Fri Aug 10 12:32:11 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 10, 2001 12:32:11 PM Subject: Problem tylannitride 2001-08-10 12:32:10: Proccess Press H- NITRIDE!= 438.1 Message-ID: From dton at snf.stanford.edu Sun Aug 12 07:25:40 2001 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Aug 12, 2001 7:25:40 PM Subject: Problem tylannitride 2001-08-12 19:25:40: MFC Alarm during Message-ID: Boat out step - (LONH378) & step 110 (or end of step 105). From zappe at snf.stanford.edu Mon Aug 13 09:35:25 2001 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Aug 13, 2001 9:35:25 PM Subject: Problem tylannitride 2001-08-13 21:35:22: leak at step 40 Message-ID: From seymour at snf.stanford.edu Tue Aug 14 09:27:45 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 14, 2001 9:27:45 AM Subject: Problem tylannitride 2001-08-13 21:35:22: leak at step 40 Message-ID: I did a leak check and the rate of rise was 2-3 mt/min tube ok From seymour at snf.stanford.edu Tue Aug 14 09:28:12 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 14, 2001 9:28:12 AM Subject: Problem tylannitride 2001-08-12 19:25:40: MFC Alarm during Message-ID: No al;arms now From seymour at snf.stanford.edu Tue Aug 14 09:28:38 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 14, 2001 9:28:38 AM Subject: Problem tylannitride 2001-08-10 12:32:10: Proccess Press H- NITRIDE!= 438.1 Message-ID: From liji at snf.stanford.edu Tue Aug 14 05:08:21 2001 From: liji at snf.stanford.edu (liji at snf.stanford.edu) Date: Aug 14, 2001 5:08:21 PM Subject: Shutdown tylannitride 2001-08-14 17:08:21: Message-ID: Failed at step 40 with LONH378. Tried twice, both failed From liji at snf.stanford.edu Tue Aug 14 05:09:57 2001 From: liji at snf.stanford.edu (liji at snf.stanford.edu) Date: Aug 14, 2001 5:09:57 PM Subject: Shutdown tylannitride 2001-08-14 17:09:55: tylannitride Message-ID: Failed twice at step 40 for high pressure From seymour at snf.stanford.edu Wed Aug 15 03:54:15 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 15, 2001 3:54:15 PM Subject: Shutdown tylannitride 2001-08-14 17:09:55: tylannitride Message-ID: replaced rear orings, did oil and filter change, and cleaned pump line. base pressure and leak rate are good. From seymour at snf.stanford.edu Wed Aug 15 03:54:57 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 15, 2001 3:54:57 PM Subject: Shutdown tylannitride 2001-08-14 17:08:21: Message-ID: checked leak rate and base pressure, ok now From seymour at snf.stanford.edu Sat Aug 25 07:35:54 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 25, 2001 7:35:54 AM Subject: Shutdown tylannitride 2001-08-25 07:35:53: Message-ID: From seymour at snf.stanford.edu Sat Aug 25 04:02:09 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 25, 2001 4:02:09 PM Subject: Shutdown tylannitride 2001-08-25 07:35:53: Message-ID: facilities o