Shutdown tylannitride 2001-08-07 17:04:46: tylannitride:shutdown for cleaning

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Aug 8 04:15:40 PDT 2001


System run w/o wafers to verify gas flows.  Ok.
LONH378 run for 60:00- dep rate about 32A/min.  Ok.
Refractive index and stress measurements will be posted
soon.




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