Shutdown tylannitride 2001-08-07 17:04:46: tylannitride:shutdown for cleaning

latta at latta at
Wed Aug 8 04:15:40 PDT 2001

System run w/o wafers to verify gas flows.  Ok.
LONH378 run for 60:00- dep rate about 32A/min.  Ok.
Refractive index and stress measurements will be posted

More information about the tylannitride-pcs mailing list