From latta at snf.stanford.edu Thu Dec 6 04:41:24 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Dec 6, 2001 4:41:24 PM Subject: Shutdown tylannitride 2001-12-06 16:41:23: Door won't open- valve not opening? Message-ID: My wafers are stuck- door didn't open at the end of the run. Jim H and I think that the soft pump or gate valve is not opening. Door motor seems to want to cooperate.... From latta at snf.stanford.edu Fri Dec 7 04:19:15 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Dec 7, 2001 4:19:15 PM Subject: Shutdown tylannitride 2001-12-06 16:41:23: Door won't open- valve not opening? Message-ID: Soft pump valve replaced. Lines from pump to tube checked. Process pressure still high. From mbadi at snf.stanford.edu Sun Dec 9 05:24:00 2001 From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu) Date: Dec 9, 2001 5:24:00 AM Subject: Problem tylannitride 2001-12-09 05:23:56: Intermittent Problem: MFS Alarm/PrcPr=80/DCS=0 Message-ID: The RI of my wafers at the end was 2.6 ... I'm not sure what film I have on my wafers at this point! I did a 3 hour dummy dep earlier today and didn't have any problems (thickness and RI were right on target). This was a 7.5 hour dep and the earliest i saw this problem was 3 hours into the run. It may have started before that. If this isn't the correct SiN film my wafers are ruined and I just lost A LOT of work... :(