Shutdown tylannitride 2001-12-06 16:41:23: Door won't open- valve not opening?

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Dec 6 04:41:24 PST 2001


My wafers are stuck- door didn't open at the end of the run.
Jim H and I think that the soft pump or gate valve is not
opening.  Door motor seems to want to cooperate....




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