From seymour at snf.stanford.edu Fri Jan 12 04:13:18 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 12, 2001 4:13:18 PM Subject: Shutdown tylannitride 2001-01-12 16:13:15: Diclorsilane Cylinder Message-ID: The cylinder of diclor has been delayed and is due to be delivered on Tuesday. There is a 24 hour pressure test required before the system can be released for test. From seymour at snf.stanford.edu Fri Jan 19 04:04:14 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 19, 2001 4:04:14 PM Subject: Comment tylannitride 2001-01-19 16:04:13: Diclor bottle changed, under pressure test untill Monday AM Message-ID: From seymour at snf.stanford.edu Tue Jan 23 07:23:41 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 23, 2001 7:23:41 AM Subject: Shutdown tylannitride 2001-01-12 16:13:15: Diclorsilane Cylinder Message-ID: cylinder changed From hlkung at snf.stanford.edu Wed Jan 24 04:15:18 2001 From: hlkung at snf.stanford.edu (hlkung at snf.stanford.edu) Date: Jan 24, 2001 4:15:18 AM Subject: Problem tylannitride 2001-01-24 04:15:16: DCS Failure Message-ID: During my run, the DCS flow dropped to zero. From hlkung at snf.stanford.edu Wed Jan 24 04:16:03 2001 From: hlkung at snf.stanford.edu (hlkung at snf.stanford.edu) Date: Jan 24, 2001 4:16:03 AM Subject: Shutdown tylannitride 2001-01-24 04:16:02: No DCS Message-ID: During my run (~2.5 hours in), the DCS flow rate dropped to zero. From seymour at snf.stanford.edu Wed Jan 24 09:01:42 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 24, 2001 9:01:42 AM Subject: Shutdown tylannitride 2001-01-24 04:16:02: No DCS Message-ID: Recharged Diclor line with product. Putting line on pressure decay test . From seymour at snf.stanford.edu Wed Jan 24 03:02:41 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Jan 24, 2001 3:02:41 PM Subject: Problem tylannitride 2001-01-24 04:15:16: DCS line leak tight. Message-ID: the pressure decay test came out good. putting system up to use. From shott at snf.stanford.edu Thu Jan 25 06:18:17 2001 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Jan 25, 2001 6:18:17 PM Subject: Problem tylannitride 2001-01-25 18:18:14: DCS Excess Flow Valva Message-ID: Ray, Dick, Mike, et al: This evening Helen Kung was running a low-stress nitride process and began to "run out of DCS". She contacted Cesar who contacted me. I remembered that earlier this week we had seen an excess flow valve condition ... so that was my firrst place to lool. Sure enough, we had another excess flow condition. I basically reset things in the DCS cabinet ... and then left the valve in "Purge Mode" so that another excess flow condition won't shut things down this evening. While I don't think we should do that as a matter of habit, I concluded that in this case it was probably OK becuase if we got a complete line rupture, the comparatively low vapor pressure would keep the flow from getting too hhigh and if there was a leak to the outside world, the detector would shut down the cylinder. Helen is running a low stress process that, I think, uses a higher flow that most "normal" nitride processes. For starters, it would be interesting to know what the excess flow valve for that tube was originally supposed to be ... I've got a suspicion that it was selected and installed during the days when "normal" (high stress) nitride was run ... and that this higher flow is right at the threshold of its shutoff point. But that is only a guess ... Certainly we need to understand why we appear to be getting excess flow alarm conditions under apparently normal (but high flow) situations. Helen is going to provide a list of all of the DCS and ammonia flows in our existing library of recipes to see if this is indeed close to the maximum flow of all recipes. Trying to find out what that valve was set at would be a good idea ... and then maybe we can determine whether it has drifted from its original setting. That's all for now ... but that is why the tylan nitride DCS gas cabinet was left in purge mode. Thanks, John From jgarate at snf.stanford.edu Fri Jan 26 10:15:53 2001 From: jgarate at snf.stanford.edu (jgarate at snf.stanford.edu) Date: Jan 26, 2001 10:15:53 AM Subject: Shutdown tylannitride 2001-01-26 10:15:52: Tube is flacking. Down for pull & clean Message-ID: