From seymour at snf.stanford.edu  Fri Jul  6 10:25:05 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jul 6, 2001 10:25:05 AM
Subject: Shutdown tylannitride 2001-06-29 22:11:18: tube cracked- leak check failed
Message-ID: <mailman.114.1357938946.26006.tylannitride-pcs@snf.stanford.edu>

passed cold and hot leak check. system up for use.



From ericp at snf.stanford.edu  Sat Jul  7 09:36:56 2001
From: ericp at snf.stanford.edu (ericp at snf.stanford.edu)
Date: Jul 7, 2001 9:36:56 PM
Subject: Problem tylannitride 2001-07-07 21:36:52: high proc.press. 
Message-ID: <mailman.115.1357938946.26006.tylannitride-pcs@snf.stanford.edu>

Hey Guys,
	The process pressure is running higher than 
normal (550 mT versus a more normal 250-300mT). Also,
I noticed that the slow pump appeared to stay on during 
the leak check (??).  Could it be that there is a leak, but 
because the slow pump is staying on the leak pressure looks 
ok?  
	Previous user (hansen) reports a low index
on his films.  This might indicate the presence of oxygen. 
Thanks,
-Eric



From latta at snf.stanford.edu  Tue Jul 10 03:03:28 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Jul 10, 2001 3:03:28 PM
Subject: Problem tylannitride 2001-07-07 21:36:52: high proc.press. 
Message-ID: <mailman.116.1357938946.26006.tylannitride-pcs@snf.stanford.edu>

Ray re-calibrated and my run was 338mT- last run was 438mT.



From latta at snf.stanford.edu  Wed Jul 11 05:27:32 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Jul 11, 2001 5:27:32 PM
Subject: Problem tylannitride 2001-07-11 17:27:30: Pressure high again- 551mT during dep
Message-ID: <mailman.117.1357938946.26006.tylannitride-pcs@snf.stanford.edu>

Will test wafers tomorrow and let Ray know dep rate thickness and RI.



From latta at snf.stanford.edu  Fri Jul 13 03:26:09 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Jul 13, 2001 3:26:09 PM
Subject: Problem tylannitride 2001-07-11 17:27:30: Pressure high again- 551mT during dep
Message-ID: <mailman.118.1357938946.26006.tylannitride-pcs@snf.stanford.edu>

Consistantly high for LONH378 program- dep rate, refractive
index and stress are all good.  
Go figure....



From seymour at snf.stanford.edu  Mon Jul 16 06:24:39 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jul 16, 2001 6:24:39 AM
Subject: Shutdown tylannitride 2001-07-16 06:24:37: burnbox clean
Message-ID: <mailman.119.1357938946.26006.tylannitride-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Mon Jul 16 08:12:09 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jul 16, 2001 8:12:09 AM
Subject: Shutdown tylannitride 2001-07-16 06:24:37: burnbox clean
Message-ID: <mailman.120.1357938946.26006.tylannitride-pcs@snf.stanford.edu>

clean completed



From seymour at snf.stanford.edu  Mon Jul 30 07:14:24 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jul 30, 2001 7:14:24 AM
Subject: Shutdown tylannitride 2001-07-30 07:14:22: down for burnbox clean
Message-ID: <mailman.121.1357938946.26006.tylannitride-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Mon Jul 30 09:46:22 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jul 30, 2001 9:46:22 AM
Subject: Shutdown tylannitride 2001-07-30 07:14:22: down for burnbox clean
Message-ID: <mailman.122.1357938946.26006.tylannitride-pcs@snf.stanford.edu>

clean on burnbox completed.  cleaned the slow pump valve.
tube is up