Problem tylannitride 2001-07-07 21:36:52: high proc.press.
ericp at snf.stanford.edu
ericp at snf.stanford.edu
Sat Jul 7 09:36:56 PDT 2001
Hey Guys,
The process pressure is running higher than
normal (550 mT versus a more normal 250-300mT). Also,
I noticed that the slow pump appeared to stay on during
the leak check (??). Could it be that there is a leak, but
because the slow pump is staying on the leak pressure looks
ok?
Previous user (hansen) reports a low index
on his films. This might indicate the presence of oxygen.
Thanks,
-Eric
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