Problem tylannitride 2001-07-07 21:36:52: high proc.press.

ericp at snf.stanford.edu ericp at snf.stanford.edu
Sat Jul 7 09:36:56 PDT 2001


Hey Guys,
	The process pressure is running higher than 
normal (550 mT versus a more normal 250-300mT). Also,
I noticed that the slow pump appeared to stay on during 
the leak check (??).  Could it be that there is a leak, but 
because the slow pump is staying on the leak pressure looks 
ok?  
	Previous user (hansen) reports a low index
on his films.  This might indicate the presence of oxygen. 
Thanks,
-Eric




More information about the tylannitride-pcs mailing list