Shutdown tylannitride 2001-06-13 07:11:49: tube clean in process

seymour at snf.stanford.edu seymour at snf.stanford.edu
Fri Jun 15 08:30:42 PDT 2001


the tube is cleaned, and the system passed cold and hot leak test. The dummy wafers need to be put in the boats, then the system is up to run




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