From seymour at snf.stanford.edu Thu Mar 1 07:23:02 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 1, 2001 7:23:02 AM Subject: Shutdown tylannitride 2001-03-01 07:23:00: Changing NH3 cylinder Message-ID: The cylinder change and leak check will take 24 hours From seymour at snf.stanford.edu Fri Mar 2 06:55:24 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 2, 2001 6:55:24 AM Subject: Shutdown tylannitride 2001-03-01 07:23:00: NH3 cylinder changed, passed leak check Message-ID: system is up for processing From seymour at snf.stanford.edu Mon Mar 5 06:04:18 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 5, 2001 6:04:18 AM Subject: Shutdown tylannitride 2001-03-05 06:04:16: burnbox clean Message-ID: From seymour at snf.stanford.edu Mon Mar 5 07:45:46 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 5, 2001 7:45:46 AM Subject: Shutdown tylannitride 2001-03-05 06:04:16: burnbox clean coompleted Message-ID: From aaronp at snf.stanford.edu Sat Mar 10 03:11:58 2001 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Mar 10, 2001 3:11:58 PM Subject: Shutdown tylannitride 2001-03-10 15:11:57: Message-ID: flow failure on N2 and no NH3 light on pannel. repeated alarms. my wafers inside. From seymour at snf.stanford.edu Mon Mar 12 07:12:42 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 12, 2001 7:12:42 AM Subject: Shutdown tylannitride 2001-03-10 15:11:57: NH3 flows Message-ID: Checked out system operation and NH3 flowed to setpoint. Unable to do a comlete checkout as the user left wafers in the tube. Pumpdown and gas flows except diclor are ok, and the problem states NH# had a flow problem. From seymour at snf.stanford.edu Thu Mar 15 07:20:55 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 15, 2001 7:20:55 AM Subject: Shutdown tylannitride 2001-03-15 07:20:54: burnbox temp low Message-ID: From seymour at snf.stanford.edu Thu Mar 15 01:48:58 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 15, 2001 1:48:58 PM Subject: Shutdown tylannitride 2001-03-15 07:20:54: burnbox temp is ok tube is up Message-ID: From dlaser at snf.stanford.edu Sat Mar 17 05:40:51 2001 From: dlaser at snf.stanford.edu (dlaser at snf.stanford.edu) Date: Mar 17, 2001 5:40:51 PM Subject: Problem tylannitride 2001-03-17 17:40:50: can't run pump10 Message-ID: prcpr appears to exceed max value at step 15, program exits. tried several times. lonh378 runs, although prcpr reads high during deposition. From seymour at snf.stanford.edu Mon Mar 19 07:37:25 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 19, 2001 7:37:25 AM Subject: Shutdown tylannitride 2001-03-19 07:37:23: pressure sensor not reading Message-ID: From seymour at snf.stanford.edu Tue Mar 20 07:10:28 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 20, 2001 7:10:28 AM Subject: Shutdown tylannitride 2001-03-19 07:37:23: pressure sensor not reading Message-ID: replaced flex line from door to sensor. From seymour at snf.stanford.edu Tue Mar 20 07:46:31 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 20, 2001 7:46:31 AM Subject: Problem tylannitride 2001-03-17 17:40:50: pump program is running tube is up Message-ID: