Shutdown tylannitride 2001-03-10 15:11:57: NH3 flows

seymour at snf.stanford.edu seymour at snf.stanford.edu
Mon Mar 12 07:12:42 PST 2001


Checked out system operation and NH3 flowed to setpoint. Unable to do a comlete checkout as the user left wafers in the tube.  Pumpdown and gas flows except diclor are ok, and the problem states NH# had a flow problem.




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