Shutdown tylannitride 2001-03-10 15:11:57: NH3 flows

seymour at seymour at
Mon Mar 12 07:12:42 PST 2001

Checked out system operation and NH3 flowed to setpoint. Unable to do a comlete checkout as the user left wafers in the tube.  Pumpdown and gas flows except diclor are ok, and the problem states NH# had a flow problem.

More information about the tylannitride-pcs mailing list