From jhemanth at snf.stanford.edu Fri May 4 08:46:30 2001 From: jhemanth at snf.stanford.edu (jhemanth at snf.stanford.edu) Date: May 4, 2001 8:46:30 PM Subject: Problem tylannitride 2001-05-04 20:46:28: MFS Alarm went off Message-ID: I was doing a nitride deposition using LONH378 for 45mins when I kept on getting the MFS alarm. I aborted at step 105 when it was about 30mins through the step. I got the wafers out and have started the PUMP program. From seymour at snf.stanford.edu Tue May 8 12:39:48 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 8, 2001 12:39:48 PM Subject: Problem tylannitride 2001-05-04 20:46:28: MFS Alarm went off Message-ID: the backfill N2 alarmed, aborting the program allowed the alarm to be silenced and the tube to open. From evelyn at snf.stanford.edu Fri May 18 08:08:56 2001 From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu) Date: May 18, 2001 8:08:56 PM Subject: Problem tylannitride 2001-05-18 20:08:55: Message-ID: tube does not open & close automatically..have to manually move it From evelyn at snf.stanford.edu Fri May 18 08:09:42 2001 From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu) Date: May 18, 2001 8:09:42 PM Subject: Problem tylannitride 2001-05-18 20:09:40: Message-ID: tube needs to be moved in & out manually From seymour at snf.stanford.edu Mon May 21 11:27:56 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 21, 2001 11:27:56 AM Subject: Problem tylannitride 2001-05-18 20:09:40: Message-ID: no problem entered in this report From seymour at snf.stanford.edu Mon May 21 11:28:18 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 21, 2001 11:28:18 AM Subject: Problem tylannitride 2001-05-18 20:08:55: Message-ID: no problem entered in this report From seymour at snf.stanford.edu Mon May 21 11:29:04 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 21, 2001 11:29:04 AM Subject: Problem tylannitride 2001-05-21 11:29:04: loader will not open in auto Message-ID: From seymour at snf.stanford.edu Mon May 21 12:59:16 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 21, 2001 12:59:16 PM Subject: Problem tylannitride 2001-05-21 11:29:04: loader will not open in auto Message-ID: found a loose set screw on the loader drive pully. tightened and checked drive, its up. From seymour at snf.stanford.edu Wed May 23 07:19:31 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 23, 2001 7:19:31 AM Subject: Shutdown tylannitride 2001-05-23 07:19:30: silane cylinder change Message-ID: From gsarmien at snf.stanford.edu Wed May 23 07:46:57 2001 From: gsarmien at snf.stanford.edu (gsarmien) Date: Wed, 23 May 2001 07:46:57 -0700 Subject: Shutdown tylannitride 2001-05-23 07:19:30: silane cylinder change Message-ID: <3B0BCD61.B07E61BC@snf.stanford.edu> Hi Ray. We don't use silane at tylannitride....but if you're working on the burnbox then it is going to be shutdown too. Gladys From seymour at snf.stanford.edu Wed May 23 08:58:28 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 23, 2001 8:58:28 AM Subject: Shutdown tylannitride 2001-05-23 07:19:30: silane cylinder change Message-ID: the burnbox has been cleaned and the system is up to run From seymour at snf.stanford.edu Tue May 29 10:49:05 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 29, 2001 10:49:05 AM Subject: Shutdown tylannitride 2001-05-29 10:49:05: N2backfil alarm and exhaust line clean Message-ID: The N2 backfill MFC is in constant alarm due to a non zero reading when shut off. From gsarmien at snf.stanford.edu Wed May 30 06:26:34 2001 From: gsarmien at snf.stanford.edu (gsarmien at snf.stanford.edu) Date: May 30, 2001 6:26:34 PM Subject: Shutdown tylannitride 2001-05-29 10:49:05: N2backfil alarm and exhaust line clean Message-ID: testrun was ok