From yyao at snf.stanford.edu Tue Nov 6 12:32:57 2001 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Nov 6, 2001 12:32:57 PM Subject: Problem tylannitride 2001-11-06 12:32:56: One of the quartz is broken. Message-ID: From mdickey at snf.stanford.edu Tue Nov 6 01:49:59 2001 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Nov 6, 2001 1:49:59 PM Subject: Comment tylannitride 2001-11-06 13:49:58: broken quartz Message-ID: There is a broken quartz wafer in one of the boats. I don't know where there is a replacement. Either the wafer should be removed or run the tube as is. Confer with Nancy . From latta at snf.stanford.edu Wed Nov 7 11:12:35 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Nov 7, 2001 11:12:35 AM Subject: Problem tylannitride 2001-11-06 12:32:56: One of the quartz is broken. Message-ID: Replaced with Si wafer. Will order new quartz replacements... From hector at snf.stanford.edu Thu Nov 8 06:29:44 2001 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Nov 8, 2001 6:29:44 AM Subject: Problem tylannitride 2001-11-08 06:29:43: DCS error, MFS alarm Message-ID: From seymour at snf.stanford.edu Thu Nov 8 09:03:55 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Nov 8, 2001 9:03:55 AM Subject: Problem tylannitride 2001-11-08 06:29:43: DCS error, MFS alarm Message-ID: unable to duplicate DCS error. There is Diclor and it does flow at the setpoint. From diadiuk at snf.stanford.edu Wed Nov 14 11:56:24 2001 From: diadiuk at snf.stanford.edu (diadiuk at snf.stanford.edu) Date: Nov 14, 2001 11:56:24 AM Subject: Shutdown tylannitride 2001-11-14 11:56:23: testing shutdown Message-ID: nothing wrong w/this machine From diadiuk at snf.stanford.edu Wed Nov 14 11:56:42 2001 From: diadiuk at snf.stanford.edu (diadiuk at snf.stanford.edu) Date: Nov 14, 2001 11:56:42 AM Subject: Problem tylannitride 2001-11-14 11:56:40: Message-ID: From diadiuk at snf.stanford.edu Wed Nov 14 12:01:25 2001 From: diadiuk at snf.stanford.edu (diadiuk at snf.stanford.edu) Date: Nov 14, 2001 12:01:25 PM Subject: Problem tylannitride 2001-11-14 12:01:23: machine shutdown Message-ID: I made a test shutdown & now I can't enable the machine! The traffic light changed from red to green. Where is the record ofthis action? Sorry if I screwed up anyone/thing. Vicky From diadiuk at snf.stanford.edu Wed Nov 14 12:06:14 2001 From: diadiuk at snf.stanford.edu (diadiuk at snf.stanford.edu) Date: Nov 14, 2001 12:06:14 PM Subject: Comment tylannitride 2001-11-14 12:06:09: can't clear shutdown Message-ID: Was able to shutdown, but can't clear it! Vicky From latta at snf.stanford.edu Wed Nov 14 12:36:15 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Nov 14, 2001 12:36:15 PM Subject: Shutdown tylannitride 2001-11-14 11:56:23: testing shutdown Message-ID: Test From latta at snf.stanford.edu Wed Nov 14 12:36:26 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Nov 14, 2001 12:36:26 PM Subject: Problem tylannitride 2001-11-14 12:01:23: machine shutdown Message-ID: test From latta at snf.stanford.edu Wed Nov 14 12:36:36 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Nov 14, 2001 12:36:36 PM Subject: Problem tylannitride 2001-11-14 11:56:40: Message-ID: test From liji at snf.stanford.edu Wed Nov 14 05:07:37 2001 From: liji at snf.stanford.edu (liji at snf.stanford.edu) Date: Nov 14, 2001 5:07:37 PM Subject: Shutdown tylannitride 2001-11-14 17:07:36: Leak pressure high Message-ID: Process pressure high at gross leak chk. Abort automatically. Failed at this step twice. No obvious debris found at the outer sealing. From hector at snf.stanford.edu Sun Nov 18 01:13:46 2001 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Nov 18, 2001 1:13:46 AM Subject: Shutdown tylannitride 2001-11-18 01:13:45: MFS; loud motor noise w/ bad smell Message-ID: From mdickey at snf.stanford.edu Mon Nov 19 02:15:58 2001 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Nov 19, 2001 2:15:58 PM Subject: Shutdown tylannitride 2001-11-18 01:13:45: MFS; loud motor noise w/ bad smell Message-ID: problem has been fixed. Door was not closing all the way From mcvittie at snf.stanford.edu Mon Nov 26 06:48:13 2001 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Nov 26, 2001 6:48:13 PM Subject: Problem tylannitride 2001-11-26 18:48:11: DCS Flow Fault Message-ID: At 6:40 pm during a nitride dep run by Liji, there was a DCS low flow fault. The flow read out was at 0.5 when read at the front panel. To get a reading at the back on the 460, I had to ack to fualt. The read was at 188 sccm. When I went back to the front panel the DCS reading was now at 188sccm. I next cleared the fault at the front panel and let the run continue. Jim McVittie From mdickey at snf.stanford.edu Wed Nov 28 07:34:18 2001 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Nov 28, 2001 7:34:18 AM Subject: Problem tylannitride 2001-11-26 18:48:11: DCS Flow Fault Message-ID: DCS is flowing From latta at snf.stanford.edu Thu Nov 29 04:48:29 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Nov 29, 2001 4:48:29 PM Subject: Problem tylannitride 2001-11-29 16:48:28: Process pressure high! Message-ID: Yesterday the process pressure was high too, 481mT, but today it is even higher, 494mT.