From seymour at snf.stanford.edu Tue Sep 4 10:16:01 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 4, 2001 10:16:01 AM Subject: Comment tylannitride 2001-09-04 10:15:59: tube clean Message-ID: I will pull and clean the tube starting thursday morning. From seymour at snf.stanford.edu Thu Sep 6 02:22:16 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 6, 2001 2:22:16 PM Subject: Shutdown tylannitride 2001-09-06 14:22:13: tube clean Message-ID: the tube thickness is at the clean level, From seymour at snf.stanford.edu Fri Sep 7 07:24:13 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 7, 2001 7:24:13 AM Subject: Shutdown tylannitride 2001-09-06 14:22:13: tube clean Message-ID: tube has been cleaned and leakcheck passed. needs testing before release to production From seymour at snf.stanford.edu Fri Sep 7 07:24:34 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 7, 2001 7:24:34 AM Subject: Shutdown tylannitride 2001-09-07 07:24:30: needs uniformity test Message-ID: From latta at snf.stanford.edu Fri Sep 7 03:21:35 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 7, 2001 3:21:35 PM Subject: Shutdown tylannitride 2001-09-07 07:24:30: needs uniformity test Message-ID: Uniformity test results; All wafers in middle boat, assumed RI of 2.372- Front 841A, 855A, 863A, 866A Back Within-a-wafer ~2% or less From gladys at snf.stanford.edu Wed Sep 12 01:33:55 2001 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Sep 12, 2001 1:33:55 PM Subject: Problem tylannitride 2001-09-12 13:33:53: tylannitride: problem with DNTLK not turning on when door closes Message-ID: From mbadi at snf.stanford.edu Wed Sep 12 06:30:32 2001 From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu) Date: Sep 12, 2001 6:30:32 PM Subject: Problem tylannitride 2001-09-12 18:30:26: tube does not come out or go in smoothly... Message-ID: ..furthermore, the door interlock does not come on. The tube has to be manually pushed in (using the buttons on the control panel) in order to get the door interlock to come on. i noticed this problem on two consecutive runs. From seymour at snf.stanford.edu Mon Sep 17 10:01:09 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 17, 2001 10:01:09 AM Subject: Problem tylannitride 2001-09-12 18:30:26: tube does not come out or go in smoothly... Message-ID: vented tube and opened door without any problems From seymour at snf.stanford.edu Mon Sep 17 10:01:38 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 17, 2001 10:01:38 AM Subject: Problem tylannitride 2001-09-12 13:33:53: tylannitride: problem with DNTLK not turning on when door closes Message-ID: door interlock on when door closes at this time From cmfaulkn at snf.stanford.edu Tue Sep 25 12:20:48 2001 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Sep 25, 2001 12:20:48 PM Subject: Problem tylannitride 2001-09-25 12:20:46: particle problem Message-ID: Our wafers came out speckled with white dust-like particles - many particles. From seymour at snf.stanford.edu Tue Sep 25 03:33:52 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 25, 2001 3:33:52 PM Subject: Comment tylannitride 2001-09-25 15:33:52: particles due to tube not sealing and pump allowed to run for extended period of time Message-ID: From gladys at snf.stanford.edu Tue Sep 25 04:57:27 2001 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Sep 25, 2001 4:57:27 PM Subject: Problem tylannitride 2001-09-25 16:57:26: tylannitride: cannot enable:supporting equip is down. Message-ID: From seymour at snf.stanford.edu Wed Sep 26 08:47:53 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 26, 2001 8:47:53 AM Subject: Problem tylannitride 2001-09-25 16:57:26: tylannitride: cannot enable:supporting equip is down. Message-ID: coral has crossed facilities stations on the toxic gasses the ammonia for sts dep was shutdown and coral thought it was the ammonia for nitride. From gladys at snf.stanford.edu Wed Sep 26 09:00:24 2001 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Sep 26, 2001 9:00:24 AM Subject: Problem tylannitride 2001-09-25 12:20:46: particle problem:Ran testrun and was ok. Gladys Message-ID: From dton at snf.stanford.edu Fri Sep 28 06:28:48 2001 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Sep 28, 2001 6:28:48 PM Subject: Shutdown tylannitride 2001-09-28 18:28:46: Pump died Message-ID: