Shutdown tylannitride 2002-12-16 07:46:51: Won't vent and N2 Back fill

seymour at seymour at
Mon Dec 16 08:52:18 PST 2002

cleaned slopump valve and replaced N2 backfill MFC with a newly calibrated one. I did an auto zero calibration and check flow on all gases. Tube is back up

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