Problem tylannitride 2002-12-15 07:26:50: tube does not come out - wafers inside!

seymour at snf.stanford.edu seymour at snf.stanford.edu
Mon Dec 16 08:58:51 PST 2002

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installed a cleaned slopump valve and checked operation

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Next message: Shutdown tylannitride 2002-12-16 07:46:51: Won't vent and N2 Back fill
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